A technique in which a fine conducting probe is held close to the surface of a sample. Electrons tunnel between the sample and the probe, producing an electrical signal. The probe is slowly moved across the surface and raised and lowered so as to keep the signal constant. A profile of the surface is produced, and a computer-generated contour map of the surface is produced. The technique is capable of resolving individual atoms, but works better with conducting materials. See also atomic force microscopy.
http://www.iap.tuwien.ac.at/www/surface/stm_gallery/stm_schematic An account of the technique with a gallery of images