“射频等离子体”的概念、定义、翻译、参考文献-科学参考

单词	射频等离子体
释义	射频等离子体 Encyclopedia 工学﹝等离子体驱动形式﹞释 radio-frequency plasma射频等离子体使用频率范围在1～200兆赫的射频交变电源驱动，放电产生的等离子体。理学气体放电释 radio frequency plasma射频等离子体由射频电磁场（2～200兆赫）激励气体放电产生的等离子体。包括容性耦合等离子体、感性耦合等离子体和螺旋波等离子体。
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