“plasmonic interference lithography”的概念、定义、翻译、参考文献-科学参考

单词	plasmonic interference lithography
释义	plasmonic interference lithography Encyclopedia 工学等离子体光刻释 plasmonic interference lithography等离子体干涉光刻利用表面等离子体波的干涉效应，产生干涉光场，并将其记录在光刻胶上，从而实现超分辨图形加工的等离子体光刻技术。
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