“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	extensive grazing extensive management of agriculture extensive mean extensive mediation extensive parameter extensive properties extensive quality extensive quantity Extensive Records compiled in the Taiping Years Extensive Records of the Forest of Affairs extensive sampling extensive shower extensive variable extensivity extensometer extensometric extensometry extensor extent extent of reaction extent of stria extenuation exterior exterior algebra exterior alternate angles

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