“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	nonirradiated non-isolated non-isolating integral non-isomorphic non-isomorphic graphs non-isomorphic groups non-isomorphic system non-isomorphism non-isospectral nonisothermality non-isothermal porous flow non isotopic carrier non-isotopic carrier nonisotopic carrier non isotopic labeled compound non-isotopic labeled compound nonisotopic labeled compound nonisotropic function space nonisotropic subspace non-iterative non-iterative algorithm non-iterative logical formula Nonius crater non-judgment non-Keplerian orbit

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