“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	marine remote sensing survey marine renewable resources marine research station marine resource marine resource chart marine restoration ecology marine reverberation marine rigthts and interests chart Mariner probe marine salinity model marine salt difference energy marine satellite navigation marine search & rescue marine secondary production marine security marine sediment marine sediment analysis marine sedimentary environment marine sedimentary organisms marine sedimentary soil mass marine sedimentation marine sediment microbes marine sediment monitoring marine sediment pore water marine sediment survey equipment

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