“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	paraquark paraquat paraquat dichloride para red parareptiles pararosaniline hydrochloride spectrophotometric method pararosaniline spectrophotometric method paraschoepite paraselene paraselenic circle parasequence parasequence set parasexuality parasexual reproduction Parashorea chinensis Rainforest parasite parasites parasitic parasitical parasitic capacitance parasitic disease parasitic disease in marine molluscs parasitic diseases comprehensive prevention and control parasitic diseases in freshwater aquaculture parasitic diseases of animal

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