“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	fixed attribute fixed-axis rotation fixed-axis rotation of rigid bodies fixed basis fixed bed fixed bed combustion fixedbed electrode fixed bed gasification fixed bed gasifier fixed bed reactor fixed bed solid adsorptive desiccant system fixed bias fixed block fixed boundary condition fixed branch point fixed buoy observation fixed capital fixed carbon of coal fixed cell fixed-charge problems fixed circle fixed Communication Satellite fixed compensation fixed component fixed component of a linear system

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