“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	Natural System of Wrangel Island Reserve Natural System of Wrangel Island Reserve of Russian World Natural Heritage natural termination natural territorial differentiation of China natural tetrad natural textile fibers natural theology natural tolerance natural topology natural transformation natural trihedron natural unit natural unit system natural uranium natural uranium exists in the form of water natural uranium (NU) natural user interface natural user interface, NUI natural variability natural vegetation natural ventilation natural ventilation of swine building natural vibration natural water natural water cycle system

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