“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	statistical average statistical average value statistical average value formula of canonical ensemble statistical average value formula of grand canonical ensemble statistical betatron process statistical broadening statistical bulletin Statistical Bulletins of National Environment Statistical calculation statistical caliber statistical characteristic statistical characteristics of complex networks statistical chart statistical classification statistical coding statistical coil statistical communication theory statistical computation statistical computing statistical computing,computational statistics statistical conclusion validity of study statistical constraint statistical control statistical copolymer statistical copolymers

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