“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	server virtualization Serve the People service serviceable time service abroad of documents service access point service access point, SAP service adapter service agreement service application mode service area service authorization service availability service binding and invocation Service blueprint service bus service business index system service business innovation and planning service business model and service business analysis modeling service business performance monitoring service business process integration management service business process model mapping service center for agriculture service centrism service choreography

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