“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	limiting current limiting diffusion current limiting dispersion limiting distribution limiting equation limiting error limiting exposure limiting factor limiting flux limiting fragmentation limiting frequency limiting function limiting group limiting hypersphere limiting kinetic current limiting load test limiting magnitude limiting migration current limiting molar conductivity limiting number limiting nutrients or biolimiting elements limiting ordinal limiting photoelectric magnitude limiting photographic magnitude limiting photovisual magnitude

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