“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	skip hoisting skipjack pole and line fisheries skip keying Skip Lievsay skip loading chamber skip loading facility skip lot sampling inspection skip-lot sampling inspection skipout skipping orbit skip shaft skip slope skip vacuum filter Skirt skirt skirtron skirt structure skis ski sports tourism ski suit Skitovich Skitovich-Darmois theorem skitron skive SKLER

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