“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	rudder and steering gear Rudder Stock of a Ship of the Ming Dynasty ruddervator rude ruderal ruderal plant Ruderman-Kittel-Kasuya-Yosida model Ruderman-Kittel-Kasuya-Yosida model, RKKY model rudiment rudimentary closure rudimentary function rudimentary horn of the uterus rudimentary organ rudimentary predicate rudimentary set Rudin Rudio Rudists Ruditapes philippinarum“Zebra” rudite Rudolf Arnheim Rudolf Bultmann Rudolf Carnap Rudolf Christian Karl Diesel Rudolf Christoph Eucken

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