“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	second-order language second-order logic second-order memristor second-order model theory second-order necessary condition second-order nonlinear optical effect second-order optimality condition second-order ordinary differential equation second order perturbation second order phase transition second-order phase transition second-order predicate second-order predicate calculus second-order predicate logic second-order process second-order property second order spatial coherence second-order spatial coherence second order spectrum second-order sufficient condition second-order system second order temporal coherence second-order temporal coherence second order term second-order theory

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