“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	tridimensional tridimensional space tri-dimensional spectroscopy tridiminished tridiminished icosahedron tridop tridual module triductor tridymite triene Trier Trieste triethanolamine triethylalurminium triethylalurminium (TEA) triethylamine triethylborane triethylene glycol triethylene glycol cleaning furnace triethylgallium triethyloxonium tetrafluoroborate triethylphosphate triethyl phosphite Trie tree Trifid Nebula

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。