“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	subglottal system subglottic stenosis subgrade subgrade bed subgrade design subgrade maintenance subgrade monitoring system subgrade ontology subgrade widening subgradient subgradient algorithm subgrain subgrain boundary subgrain rotation recrystallization subgraph subgrib-scale orographic drag parameterization subgroup subgroup chain subgroup element subgroup growth subgroup index subgrouping subgroup of a point subgroup of automorphisms subgroup of boundaries

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。