“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	pure inseparable morphism pure integer programming pure iron pure iron for raw material Pure Land Belief Pure Land Buddhism pure local time pure luminosity evolution purely arithmetical quantity purely atomic measure purely binary number purely contractive operator-valued function purely discrete spectrum purely imaginary purely imaginary expression purely imaginary number purely imaginary quaternion purely imaginary time purely indecomposable group purely infinite von Neumann algebra purely inseparable element purely inseparable extension purely inseparable isogeny purely inseparable mapping purely inseparable morphism

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