“x-ray lithography”的概念、定义、翻译、参考文献-科学参考

单词	x-ray lithography
释义	x-ray lithography [`eks´rā li`thäg·rǝ·fē] ^ELECTRONICS Lithography in which the resist is exposed to a well-collimated, high-intensity x-ray beam projected through a special mask in close proximity to the silicon slice.
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