| Rutherford backscattering spectrometry [`rǝth·ǝr·fǝrd `bak´skad·ǝ·riŋ spek`träm·ǝ·trē] SPECTROSCOPY A method of determining the concentrations of various elements as a function of depth beneath the surface of a sample, by measuring the energy spectrum of ions which are backscattered out of a beam directed at the surface. |