“secondary ion mass spectrometer”的概念、定义、翻译、参考文献-科学参考

单词	secondary ion mass spectrometer
释义	secondary ion mass spectrometer [`sek·ǝn´der·ē `ī´än `mas spek`tram·ǝd·ǝr] ^ENGINEERING An instrument for microscopic chemical analysis, in which a beam of primary ions with an energy in the range 5-20 kiloelectronvolts bombards a small spot on the surface of a sample, and positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer. Abbreviated SIMS. Also known as ion microprobe; ion probe.
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