单词 | secondary ion mass spectrometer |
释义 | secondary ion mass spectrometer [`sek·ǝn´der·ē `ī´än `mas spek`tram·ǝd·ǝr] ENGINEERING An instrument for microscopic chemical analysis, in which a beam of primary ions with an energy in the range 5-20 kiloelectronvolts bombards a small spot on the surface of a sample, and positive and negative secondary ions sputtered from the surface are analyzed in a mass spectrometer. Abbreviated SIMS. Also known as ion microprobe; ion probe. |
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