| 单词 | electron-beam lithography |
| 释义 | electron-beam lithography [i`lek´trän ´bēm li`thäg·rǝ·fē] ELECTRONICS Lithography in which the radiation- sensitive film or resist is placed in the vacuum chamber of a scanning-beam electron microscope and exposed by an electron beam under digital computer control; after exposure, the film is removed from the vacuum chamber for conventional development and other production processes. |
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