“chemical vapor deposition”的概念、定义、翻译、参考文献-科学参考

单词	chemical vapor deposition
释义	chemical vapor deposition [`kem·i·kǝl ¦vā·pǝr ´dep·ǝ`zish·ǝn] ^{SOLID-STATE PHYSICS} The growth of thin solid films on a crystalline substrate as the result of thermochemical vapor-phase reactions. Abbreviated CVD.
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