| 单词 | metal-organic chemical vapor deposition |
| 释义 | metal-organic chemical vapor deposition [`med·ǝl ȯr`gan·ik `kem·ǝ·kǝl `vā·pǝr ´dep·ǝ`zish·ǝn] SOLID-STATE PHYSICS A technique for growing thin layers of compound semiconductors in which metal organic compounds, having the formula MRx , where M is a group III metal and R is an organic radical, are decomposed near the surface of a heated substrate wafer, in the presence of a hydride of a group V element. Abbreviated MOCVD. |
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