“direct laser lithography”的概念、定义、翻译、参考文献-科学参考

单词	direct laser lithography
释义	direct laser lithography Encyclopedia 工学光刻技术释 direct laser lithography激光直写光刻利用强度可变的激光束对基片表面的抗刻蚀材料进行曝光，显影后在抗蚀层形成所需图形的过程。
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