“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	causal network causal past causal reasoning causal relation Causal Relationship Prediction Model causal signal causal transform causation between injury and disease causation in epidemiology causative relation in criminal law cause caused-motion construction cause effect graph Cause-Eliminated Life Tables cause of death Cause of Shangshi cause of wave formation cause, reason and categorization causes causes of animal behaviour causes of disease causes of mental development cause specific hazards function Cause-THe Birth of Hero cause variable

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