“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	stepping motor stepping regression stepping stone stepping test step point step potential step potential difference step process step profilometer step pulley step pulse step resistance step response step response method step response of excitation control system step rocket step search method step sequence step servo system step size step size in search step size; step width step stress test step type optical fiber step-type optical fiber

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