“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	pulmonary alveolus pulmonary arterial hypertension pulmonary arteriovenous malformations pulmonary artery pulmonary barotrauma pulmonary bulla pulmonary candidiasis pulmonary capacity pulmonary capillary wedge pressure pulmonary circulation pulmonary collapse pulmonary collaterals pulmonary congenital disease pulmonary cryptococcosis pulmonary cytology pulmonary deflation reflex pulmonary delivery systems of biotechnology drugs pulmonary diffusion capacity pulmonary disease pulmonary echinococcosis pulmonary edema pulmonary embolism pulmonary encephalopathy pulmonary gas exchange function pulmonary hepatization

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