“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	addition-elimination mechanism addition formula addition logarithm addition method addition model addition-multiplication magic square addition of matrices addition of polynomials in one variable addition of sets addition of tensors addition of the elevated rank to the official's new post addition of vectors addition polymer addition polymerization addition principle addition [reaction] addition reaction addition rule addition sign addition system addition table addition term by term addition theorem addition theorem of probability distribution addition tricolor

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