“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	first filial generation First Film Factory, Ministery of Chemical Industry first financial channel first five-year plan of China first flight of prototype first flush devices first focal point first form of barycentric Lagrange interpolation formula First Frost first fundamental form first fundamental quantity first fundamental theorem first fundamental theorem of calculus first galaxies first generation antipsychotics first generation biofuels first-generation biofuels first generation computer First Generation Director first generation improvement clonal seed orchard first generation language first generation language, 1GL first generation mobile communication technology first generation orchard first generation sequencing techniques

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