“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	residual reserve volume residual resistance residual resistance factor residual resistivity residual resistivity ratio residual resistivity ratio, RRR residual rights of control/claim residual series residual set residual social policy model residual solvent test of pharmaceuticals residual space residual spectrum residual static correction residual stress residual stress analysis/residual stress testing techniques residual stress in additive manufacturing residual stress measurement residual strong nuclear force residual structure residual subgroup residual subset residual sulfur content in viscose residual sum residual sum of squares

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