“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	planetary magnetosphere planetary-mass companion planetary-mass object planetary meteorology planetary mill planetary motion planetary nebula planetary nomenclature planetary nutation terms planetary occultation planetary occultation of star planetary orbit planetary orbital elements planetary perturbation planetary photogrammetry planetary physics planetary plasmasphere planetary precession planetary probe planetary protection planetary radio astronomy planetary radio emission planetary raw material planetary ring planetary Rossby wave

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