“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	in极小原理 I/O IO Io IOA Ioan Grigorescu Ioannina Ioannity IOBC I. O. Bendixson I. O. Bendixson (1861—1935) IOCAS Iocaste IOCG IOC Olympic Prize for Sports Sciences IOD iodation iodic acid iodide iodide decomposition process iodimetric method iodimetric titration iodimetry iodine iodine 123

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