“diffraction grating alignment measure”的概念、定义、翻译、参考文献-科学参考

单词	diffraction grating alignment measure
释义	diffraction grating alignment measure Encyclopedia 工学光刻机测量系统释 diffraction grating alignment measure光栅衍射对准测量在硅片面或被测物表面制作相位光栅标记，测量光束在照射至相位光栅标记后，产生多级衍射光束，通过光路结构使各级正负级次衍射光束相互发生干涉的测量方法。
随便看	absolute photometry absolute photovisual magnitude absolute pitch absolute plane absolute plate tectonics absolute pointing absolute position absolute positioning absolute poverty absolute pressure absolute pressure sensor absolute probability absolute proper motion absolute property absolute pseudoprime absolute pyrheliometer absolute quadric absolute quadric hypersurface absolute quantity absolute radio magnitude absolute radiometric calibration absolute radiometric calibration of cameras absolute radiometric magnitude absolute radiometry absolute rank

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