“高密度等离子体刻蚀”的概念、定义、翻译、参考文献-科学参考

单词	高密度等离子体刻蚀
释义	高密度等离子体刻蚀 Encyclopedia 工学刻蚀工艺释 high-density plasma etching高密度等离子体刻蚀在集成电路制造中，利用高频辉光放电反应原理产生等离子体的干法刻蚀技术。
随便看	adiabatic inversion adiabatic ionization adiabaticity adiabatic law adiabatic line adiabatic local density approximation adiabatic local density approximation, ALDA adiabatic low-energy injection and capture experiment adiabatic nuclear demagnetization adiabaticnuclear demagnetization adiabatic perturbation adiabatic plasmon adiabatic process adiabatic processes of atmosphere adiabatic pulsation adiabatic quantum computation adiabatic rate of air temperature on cropland adiabatic reaction dynamics adiabatic reactor adiabatic shear band adiabatic sound speed adiabatic speed of sound adiabatic structure adiabatic switching adiabatic system

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