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靶材料
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靶材料
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靶材料
荷能粒子轰击或加热蒸发的目标材料。通常指溅射靶材,通过等离子或电子束轰击靶材,在特定的基面上形成10~10000纳米级薄膜,进而通过后续加工工艺形成导电层、栅极、阻挡层、绝缘层和线路等。
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field of extremals
field of finite type
field of force
field of formal Laurent series
field of fractions
field of frames
field of functions
field of geometric objects
field of image
field of interpretation
field of line elements
field of lines
field of moduli
field of moments
field of natural coframes
field of natural frames
field of orthonormal coframes
field of orthonormal frames
field of p-adic numbers
field of points
field of prominences
field of quotients
field of rational expressions
field of rational fractions
field of rational functions
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