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阳极键合
释义
阳极键合
Encyclopedia
工学
[传感器制造]
释
anodic bonding
阳极键合
将玻璃与金属、合金或半导体键合在一起,不用任何黏结剂的一种工艺技术。又称静电键合、静电封接。
工学
磁致动器
释
anodic bonding
阳极键合
通过在硅片和玻璃之间施加强电场,形成很强的静电力,将两个表面紧密吸合在一起,使表面区域的大部分原子可以在一定温度下,形成硅-氧化学键(Si-O),从而使硅片和玻璃成为一个牢固的整体的技术。又称静电键合。
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