“超精密加工”的概念、定义、翻译、参考文献-科学参考

单词	超精密加工
释义	超精密加工 Encyclopedia 工学数字化制造释 ultra-precision machining超精密加工加工尺寸精度达到10纳米，表面粗糙度1纳米，加工的最小尺寸可达1微米的加工工艺。工学超精密加工释 ultra-precision machining超精密加工加工零件的尺寸或形状精度优于100纳米，表面粗糙度Ra小于20纳米的加工技术。
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