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谐振式微电子机械系统压力传感器
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谐振式微电子机械系统压力传感器
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工学
微电子机械系统
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resonant micro-electromechanical system pressure sensor
谐振式微电子机械系统压力传感器
将微机电加工技术和机械谐振式传感技术有机结合而制成的压力传感器。
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