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自对准双重曝光技术
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自对准双重曝光技术
Encyclopedia
工学
光刻技术
释
self alignment double exposure technology
自对准双重曝光技术
集成电路制造中,在光刻环节对光刻胶覆盖的晶片分别进行两次曝光的技术。
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algebraic operation of matrices
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algebraic optimization
algebraic Peano error representation
algebraic point
algebraic polynomial
algebraic power series
algebraic P/poly
algebraic probability space
algebraic probability theory
algebraic programming
algebraic projective geometry
algebraic property
algebraic property test
algebraic quotient group
algebraic reduction
algebraic relation
algebraic representation
algebraic Riccati equation
algebraic root
algebraics
algebraic scheme
algebraic semantics
algebraic series
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