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脉冲式金属有机化合物气相沉积
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脉冲式金属有机化合物气相沉积
Encyclopedia
工学
半导体外延生长
释
pulsed metal-organic chemical vapor deposition
脉冲式金属有机化合物气相沉积
将Ⅲ族金属有机化合物与Ⅴ族氢化物或烷基化合物,以脉冲相间隔交替的方式通入化学沉积系统反应室,在高温反应室中分解并在衬底上沉积生成化合物的技术。简称PMOCVD。
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chemical milling
chemical mineral processing
chemical mineral processing of adsorption rare-earth ore
chemical mineral processing of bismuth middles
chemical mineral processing of carbonat gangue phosphoric ore
chemical mineral processing of cut-off grade of copper ore
chemical mineral processing of cut-off-grade of uranium ore
chemical mineral processing of diamond concentrate
chemical mineral processing of graphite concentrate
chemical mineral processing of high-silium low grade iron ore
chemical mineral processing of kaoline concentrate
chemical mineral processing of manganese concentrate
chemical mineral processing of molybdenum middles
chemical mineral processing of Ni-Mo-V concentrate
chemical mineral processing of quartz concentrate
chemical mineral processing of refractory run-of-mine ore
chemical mineral processing of tantalum-niobium middles
chemical mineral processing of tin middles
chemical mineral processing of tungsten middles
chemical mineral processing of uranium ore
chemical mineral processing of vanadium-titanium magnetite concentrate
chemical mineral processing reagent
chemical models of atmospheric pollution
chemical modification
chemical modification of antisense oligonucleotide
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