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缓冲层技术
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缓冲层技术
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释
buffer layer
缓冲层技术
现在利用金属有机物化学气相沉积技术制备氮化镓薄膜,标准方法是采用两步生长技术,即先在蓝宝石基片上在较低温度下沉积一层,为氮化铝或氮化镓,这一层就称之为缓冲层,然后升高温度,外延生长氮化镓材料。如果外延氮化镓薄膜是利用碳化硅或硅作为衬底,往往利用高温下生长氮化铝作为缓冲层。
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rank of a group
rank of a lattice
rank of a Lie algebra
rank of a linear mapping
rank of a linear transformation
rank of a matrix
rank of a module
rank of an algebra
rank of an algebraic group
rank of an analytic mapping
rank of an eigenvalue
rank of an element
rank of an elliptic curve
rank of an ideal
rank of an operator
rank of a partition
rank of a prime ideal
rank of a projective module
rank of a quadratic form
rank of a relation
rank of a ring
rank of a root system
rank of a set
rank of a set of vectors
rank of a singular point
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