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纳米球光刻技术
释义
纳米球光刻技术
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理学
纳米球光刻技术
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nanosphere lithography
纳米球光刻技术
利用单层纳米球作为微透镜阵列,入射光经过纳米球的汇聚后,可以选择性地曝光胶体球底部的光刻胶,从而将胶体球阵列的周期性转移到光刻胶上,结合沉积、刻蚀等工艺可以进行纳米尺度的微细加工的技术。
Chemistry
>物理化学>纳米化学>释义
nanosphere lithography
纳米球光刻技术
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