“等离子体表面处理仪”的概念、定义、翻译、参考文献-科学参考

单词	等离子体表面处理仪
释义	等离子体表面处理仪 Encyclopedia 工学制样/消解设备释 plasma cleaner等离子体表面处理仪通过利用对气体施加足够的能量使之离化成为等离子状态，利用这些活性粒子的“活化作用”来处理样品表面，实现清洁、改性、光刻胶灰化等目的的仪器。
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。