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等离子体溅射
释义
等离子体溅射
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工学
半导体薄膜制备
释
plasma sputtering
等离子体溅射
利用真空室中的稀有气体通过辉光放电产生的等离子体轰击靶材,使其原子溅射出来,落在镀件表面形成薄膜的物理气相淀积技术。
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single-scattering theory
single screw compressor
single sculls of Summer Paralympics
single seine vessel
single-server
single-server queue
single server system
single-server system
single set valued mapping
single set-valued mapping
single shield rock tunnel boring machine
single-shot terahertz detection
single-side band modulation and demodulation
single-sideband receiver
single-sided disk
single sided flat linear motor
single-sided sander
single skating
single-slit diffraction
single slit diffraction measurement
single-sorted language
single-species assessment model
single-species grazing
single-spectrum binary
single-stage mass transfer equipment
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