“等离子体溅射”的概念、定义、翻译、参考文献-科学参考

单词	等离子体溅射
释义	等离子体溅射 Encyclopedia 工学半导体薄膜制备释 plasma sputtering等离子体溅射利用真空室中的稀有气体通过辉光放电产生的等离子体轰击靶材，使其原子溅射出来，落在镀件表面形成薄膜的物理气相淀积技术。
随便看	rate of strain rate-of-strain tensor rate of tailings utilization rate of towing vehicle to trailer rate of truck-trailer rate of using supplying water rate of waste rock utilization rate of water loss in heating system rate of wave energy flux/wave power rate process Rate ratio, RR rate rebalancing rate regulation rater's error rate sensitivity rate strap-down inertial guidance rate theory rate theory of elementary reaction RAT-free set Rathke hydatoncus rating rating curve rating method rating scale ratings fulfilled

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