“等离子体溅射”的概念、定义、翻译、参考文献-科学参考

单词	等离子体溅射
释义	等离子体溅射 Encyclopedia 工学半导体薄膜制备释 plasma sputtering等离子体溅射利用真空室中的稀有气体通过辉光放电产生的等离子体轰击靶材，使其原子溅射出来，落在镀件表面形成薄膜的物理气相淀积技术。
随便看	Pherkad Pherkad Minor pheromone pheromone binding protein pheromone biosynthetic activating neuropeptide pheromone effect pheromone inhibitor pheromone; insect hormone pheromone trapping survey pheromonostatin pheromonotropin pheron Phetchabun Phetchaburi pH glass electrode phialocyst phialophore phialospore phi-coefficient phi-convergent sequence phi-convergent series phi-curve phi-density phi-descent Phidias

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