“等离子体抛光”的概念、定义、翻译、参考文献-科学参考

单词	等离子体抛光
释义	等离子体抛光 Encyclopedia 工学等离子体抛光释 plasma polishing等离子体抛光等离子体抛光是常压下利用高频激励产生活性物质，与基底材料发生化学反应，高速去除硅基材料的抛光方法。
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。