“等离子体光刻”的概念、定义、翻译、参考文献-科学参考

单词	等离子体光刻
释义	等离子体光刻 Encyclopedia 工学等离子体光刻释 plasmonic lithography等离子体光刻利用金和银等贵金属所激发的表面等离子体共振效应，突破传统光刻分辨力衍射极限的新型光刻技术。
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