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空洞填埋层上源漏器件结构
释义
空洞填埋层上源漏器件结构
Encyclopedia
工学
介质隔离MOS器件
释
source/drain on nothing device structure
空洞填埋层上源漏器件结构
源区和漏区与体衬底之间由空隙层隔离的一种局域化的空洞填埋层上硅器件结构。
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Mouzi Lihuo Lun
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