“离子镀”的概念、定义、翻译、参考文献-科学参考

单词	离子镀
释义	离子镀 Encyclopedia 工学表面技术释 ion plating离子镀在真空条件下，利用气体放电使气体或被蒸发物质部分电离，并在气体离子或被蒸发物质离子的轰击下，将蒸发物质或其反应物沉积在基片上的方法。工学物理气相沉积释 ion plating离子镀伴随有原子尺度高能粒子连续或周期性轰击作用的真空薄膜沉积技术。
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