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离子背散射分析
释义
离子背散射分析
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工学
[核技术分析方法]
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ion back scattering analysis
离子背散射分析
一种利用高能加速器产生的高能离子束分析薄膜或固体近表面层化学成分的表面分析方法。又称卢瑟福背散射分析(Rutherford Backscattering Spectrometry ,RBS)。
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