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离子清洗
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离子清洗
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工学
激光加工
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ion cleaning
离子清洗
利用离子源发射出的具有一定能量的离子束对基底表面进行轰击,利用离子的活性和能量,去除基底表面的污染物和吸附物质,获得清洁表面的技术。
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