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离子注入工艺
释义
离子注入工艺
Encyclopedia
工学
【红外探测器工艺】
释
ion implantation technology
离子注入工艺
通过高压离子轰击固体材料表面,高压离子束与固体材料发生原子级的高能碰撞而减速,最终留在固体内部的工艺技术。
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