“离子束溅射镀膜装置”的概念、定义、翻译、参考文献-科学参考

单词	离子束溅射镀膜装置
释义	离子束溅射镀膜装置 Encyclopedia 工学物理气相沉积技术释 ion beam sputtering deposition system离子束溅射镀膜装置通过离子束轰击固体靶材，使溅射的粒子沉积于基材（工件）形成固体薄膜的一种真空镀膜装置，主要由真空系统、离子源、溅射靶材、控制系统等几部分组成。
随便看	factorial constant factorial cumulant factorial design factorial design-overlapping resolution mapping factorial effect factorial experiment factorial experiment design factorial function factoriality factorial method factorial moment factorial moment generating function factorial moment measure factorial number factorial polynomial factorial power factorial prime factorial product factorial ring factorial Schur function factorial series factorial sum factorial variety factoring factoring contract

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。