“磁控溅射镀膜装置”的概念、定义、翻译、参考文献-科学参考

单词	磁控溅射镀膜装置
释义	磁控溅射镀膜装置 Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	Chemical Industry Museum of China chemical industry production virtual reality technology chemical industry safety feature chemical industry supply chain management chemical Information chemical information retrieval Chemical Instruments and Automation chemical interference chemical ionization chemical ionization (CI) chemical isotope separation Chemical Journal Chemical kinetics chemical kinetics chemical laser chemical leaching chemical leaching reagent for polluted soil chemical lifecycle management chemical literature database chemical-looping combustion chemical looping combustion power cycles chemically activated reactions chemically induced dynamic electron polarization chemically induced dynamic electron polarization (CIDEP) chemically modified electrode

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。