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磁控溅射镀膜装置
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磁控溅射镀膜装置
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magnetron sputtering equipment
磁控溅射镀膜装置
在真空室中利用磁控溅射技术在基片(工件)表面形成薄膜的镀膜装置,主要由真空室、真空(排气)系统、充气系统、磁控溅射源系统和控制系统组成。
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