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碳化硅单晶生长
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碳化硅单晶生长
Encyclopedia
工学
[体单晶制备方法]
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silicon carbide single crystal growth
碳化硅单晶生长
碳化硅多晶粉、含硅和碳的熔体或气相组分,在高温下通过升华、熔体过冷或气相传输等不同的方式,使含碳和硅的组分在碳化硅籽晶上结晶,生长碳化硅单晶的技术。
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