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硅热氧化工艺
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硅热氧化工艺
Encyclopedia
工学
【半导体工艺技术】
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silicon thermal oxidation technology
硅热氧化工艺
硅(Si)与含有氧化物质的气体,如水汽和氧气在高温下发生化学反应,在硅片表面生成一层致密的二氧化硅(SiO2)薄膜的过程。
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