“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	soil hydroscopicity soil infiltration soil information soil information system soiling forages soil inorganic pollution soil in situ remediation soil in-situ remediation soil ion exchange soil iron cycle soil isoelectric point soil-landscape relationship model soil-landscape,soilscape soil law and regulation soil leachate soilless culture soilless culture facility soilless oil-base drilling fluid soilless sod soil ligand exchange soil light fraction organic matter Soil loss tolerance soil loss tolerance soil macrofauna soil magnesium

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