“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	floating glass floating grid floating injection floating input floating interest rate floating-leaved plant floating liquefied natural gas floating mark floating method floating phase floating plant floating plug drawing floating point floating-point floating-point arithmetic floating-point calculation floating-point computer floating-point notation floating point number floating-point number floating-point operation floating point operations per second floating-point operations per second floating point operations per second, FLOPS floating-point operations per second, FLOPS

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。