“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Chemical Processing Engineering of Forest Products, Southwest ForestryUniversity chemical processing of coal wastewater chemical process of marine pollutant chemical process of water pollution chemical process safety chemical process systems analysis chemical production business process reengineering chemical production decision support system chemical production enterprise chemical production risk assessment chemical propellant chemical properties of ceramics chemical property of wood chemical protective clothing chemical qualitative identification of crude drug chemical quantity sensor chemical reaction chemical reaction boundary layer chemical reaction dynamics chemical reaction energy storage Chemical Reaction Engineering chemical reaction heat storage chemical reaction inhibitor chemical reaction isotherm chemical reaction kinetics

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。