“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Xi'an International Trade & Logistics Park xianji Xi'an Jiaotong University Xi'an Jiao Tong University Library Xi'an Jiaotong University Westward Migration Patriotic Struggle Advanced Collective Xianjingtai Scenic and Historic Area Xianjingtai Ziran Fengjingqu xianju Xianju chicken Xianju Scenic and Historic Area Xiankezhou Xian Lingxia Xian Mausoleum of Ming Dynasty Xi'an Mosque Xi ' an Municipal Archives Xi'an Museum Xianning Museum Xianning Shi Xiannong Tan Xiannv Hu Xi'an People's theatre Xi`an Physical Education University Xi'an Poetry Anthology Xi'an Public Library Xi'an pulsed reactor

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。