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硅基微机电系统
释义
硅基微机电系统
Encyclopedia
工学
微纳器件
释
silicon-based micro electro-mechanical system; silicon-based MEMS
硅基微机电系统
在硅、绝缘体上硅(silicon-on-insulator,SOI)等基底材料的基础上,应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
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join operator
join optimization
join point
join-preserving homomorphism
join-preserving mapping
join-reducible element
join representation
join semi-lattice
join-stable
joint
joint action
joint action effect
joint action of chemicals
joint action of toxicant
joint analysis
joint application development
Joint Astronomy Centre
joint attention
joint authorship poems
joint biomechanics
joint breeding
joint characteristic function
joint classification of scientific and technological archives
Joint Commission on Rural Reconstruction (JCRR)
Joint Committee for Traceability in Laboratory Medicine
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更新时间:2025/12/26 22:54:14