“硅基微机电系统”的概念、定义、翻译、参考文献-科学参考

单词	硅基微机电系统
释义	硅基微机电系统 Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	planing of urban fire control planisphere planispheric astrolabe planitia Planitia Descensus planitron planizer plank Plank function Plank Road Remains at Sanmenxia Plank's law plankton plankton community plankton sampler planktothrix agardhii virus plan law planned capacity of thermal power plant planned commodity abolishment planned ecological industrial park model planned economic system planned maintenance Planned Obsolescence planned population migration planned preventive maintenance system planned price of agricultural products

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。