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真空电子器件离子束加工
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真空电子器件离子束加工
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真空电子器件离子束加工
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ion beam microfabrication of vacuum electronic device
真空电子器件离子束加工
通过具有一定能量的离子束与固体表面相互作用来改变固体表面物理、化学性质和几何结构的精密加工技术。
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