“真空电子器件离子束加工”的概念、定义、翻译、参考文献-科学参考

单词	真空电子器件离子束加工
释义	真空电子器件离子束加工 Encyclopedia 工学真空电子器件离子束加工释 ion beam microfabrication of vacuum electronic device真空电子器件离子束加工通过具有一定能量的离子束与固体表面相互作用来改变固体表面物理、化学性质和几何结构的精密加工技术。
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。