“相移掩膜等离子体成像光刻”的概念、定义、翻译、参考文献-科学参考

单词	相移掩膜等离子体成像光刻
释义	相移掩膜等离子体成像光刻 Encyclopedia 工学等离子体成像光刻释 phase-shifting mask plasmonic imaging lithography相移掩膜等离子体成像光刻利用相移掩模技术，提高等离子体成像光刻分辨力的等离子体成像光刻技术。
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。