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相移掩膜等离子体成像光刻
释义
相移掩膜等离子体成像光刻
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工学
等离子体成像光刻
释
phase-shifting mask plasmonic imaging lithography
相移掩膜等离子体成像光刻
利用相移掩模技术,提高等离子体成像光刻分辨力的等离子体成像光刻技术。
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phase structure
phase subspace
phase-swept interferometer
phase-swept interferometry
phase switching
phase-switching interferometer
phase-switching interferometry
phase synchronization
Phase Theory
phase to ground
phase tracking
phase training plan
phase trajectory
phase transfer catalysis
phase-transfer catalysis
phase transfer catalytic technology
phase transfer function
phase transfer polymerization
phase transformation
phase transformation induced plasticity
phase transformation of ceramics
phase transformation reaction
phase transformations in solids
phase transformation theory
phase transition
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