“电感耦合等离子体化学气相沉积”的概念、定义、翻译、参考文献-科学参考

单词	电感耦合等离子体化学气相沉积
释义	电感耦合等离子体化学气相沉积 Encyclopedia 工学【半导体工艺技术】释电感耦合等离子体化学气相沉积基于传统等离子体增强化学气相沉积（plasma enhanced chemical vapor deposition; PECVD）技术，结合电感耦合等离子体技术产生的一种化学气相沉积方法。
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。