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电子束曝光技术
释义
电子束曝光技术
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电子束曝光技术
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electron beam lithography
电子束曝光技术
利用电子束在样品表面制造、加工图样的工艺。是纳米加工领域的关键技术。
Chemistry
>物理化学>纳米化学>释义
electron beam lithography
电子束曝光技术
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