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电子束光刻
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电子束光刻
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electron beam lithography
电子束光刻
利用聚焦的加速电子束在涂有抗蚀剂的铬板或者半导体基片上进行微纳米结构图形制备的工艺。
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purely contractive operator-valued function
purely discrete spectrum
purely imaginary
purely imaginary expression
purely imaginary number
purely imaginary quaternion
purely imaginary time
purely indecomposable group
purely infinite von Neumann algebra
purely inseparable element
purely inseparable extension
purely inseparable isogeny
purely inseparable mapping
purely inseparable morphism
purely nondeterministic process
purely periodic
purely periodic decimal
purely quadratic function
purely random process
purely scattering
purely scattering atmosphere
purely transcendental extension
purely unrectifiable set
pure magnesium
pure mathematics
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