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热解化学气相沉积
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热解化学气相沉积
Encyclopedia
工学
化学气相沉积
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pyrolytic chemical vapor deposition
热解化学气相沉积
在简单的单温区炉中,在真空或惰性气体保护下加热基体至所需温度后导入反应气体使之发生热解反应,最后在基体上沉积出固相涂层的方法。
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