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激光干涉仪几何量测量
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激光干涉仪几何量测量
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激光干涉仪几何量测量
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Geometric measurement of laser interferometer
激光干涉仪几何量测量
激光干涉仪主要是以迈克尔逊干涉仪为主,并以稳频氦氖激光为光源,构成一个具有干涉作用的测量系统。激光干涉仪可配合各种折射镜、反射镜等来做线性位置、速度、角度、平行度和垂直度等测量工作,并可作为精密工具机或测量仪器的校正工作。
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