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激光参数检测
释义
激光参数检测
Encyclopedia
工学
光刻光源
释
laser parameter detection
激光参数检测
在光刻光源投入使用前,对光刻激光性能参数进行准确检测评估,并在使用过程中实时监测控制。与光刻系统成本、光刻质量、成品率、效率和设备利用率等密切相关。
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supporting plate
supporting point
supporting set
supporting structural design
supporting structure
supporting system
support interference
supportive communication
supportive counseling
supportive relationship
support line
support listening
support mechanism
supportment for flight test safety
support metal strong interaction
support-metal strong interaction
support metal strong interaction (SMSI)
support-metal strong interaction (SMSI)
support of a bundle
support of a chain
support of a coherent sheaf
support of a cohomology
support of a complex
support of a current
support of a differential form
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