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溅射工艺
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溅射工艺
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溅射工艺
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sputtering technique
溅射工艺
以一定能量的粒子(离子或中性原子、分子)轰击固体表面,使固体近表面的原子或分子获得足够的能量而逸出靶材表面并沉积在衬底上的工艺。
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