“浸入式光刻技术”的概念、定义、翻译、参考文献-科学参考

单词	浸入式光刻技术
释义	浸入式光刻技术 Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	fineness of sieving fineness of tailings fineness ratio Fine number fine ore bin fine ore recovery fine paper of the Ming and Qing Dynasties fine particle fine particle flotation fine partition fine polymer fine polymer materials fine-pored fine potential theory fine pressure Fine production fine pulverized coal separator fine pumping fine ramie fabric finer covering fine resolution finer partition finer topology finer uniform structure fine screen

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。