“浸入式光刻技术”的概念、定义、翻译、参考文献-科学参考

单词	浸入式光刻技术
释义	浸入式光刻技术 Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	biomass direct-fire power generation biomass energy biomass energy and material biomass energy conversion biomass fast pyrolysis biomass feedstock biomass fermentation biomass fuel biomass fuel boiler biomass fuel cell power generation biomass fueled boiler biomass fuel gas reforming biomass gas biomass gasification biomass gasification for power generation biomass gasification fuel cell power generation biomass gasification power generation biomass gasification technology biomass gasifier biomass gas purification biomass generator biomass integrated gasification combined cycle Biomass integrated gasification combined cycle power plant,Varnamo biomass liquefaction biomass liquefaction technology

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。