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浸入式光刻技术
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浸入式光刻技术
Encyclopedia
工学
光刻技术
释
immersion lithography technology
浸入式光刻技术
集成电路制造中,利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF(193纳米)浸入式光刻技术。
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low-income households assistance
low-income neighbourhood in urban China
low-index material
low inertia motor
Low Ing Sing
Low-Insured
low-intensity
low intensity reciprocity
low intensity reciprocity failure
low ion
low ionization nuclear emission-line region
low-ionization nuclear emission-line region,LINER
low-K dielectric
Low key
lowland
low latency trading
low latitude forcing
low level
low-level equilibrium trap
low level formatting
low-level jet
low level language
low-level language
low level laser therapy
low-level laser therapy
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