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斐索干涉仪
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斐索干涉仪
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干涉仪
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Fizeau interferometer
斐索干涉仪
基于光波在光学元件界面上的振幅分割后形成待测表面的反射与参考表面反射光的干涉效应,利用等厚干涉原理,用以检测待测光学元件的面形、光学镜头的波面像差以及光学材料均匀性等的精密仪器。
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