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快速热退火
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快速热退火
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工学
杂质扩散工艺
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rapid thermal anneal
快速热退火
在极短的时间内,通过快速升降温在高温下实现半导体材料掺杂激活与缺陷修复的半导体制造工艺技术。是一种快速热处理工艺。
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product contact surface
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