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微电子机械系统生物化学传感器
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微电子机械系统生物化学传感器
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微电子机械系统
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micro-electromechanical system biochemical sensor
微电子机械系统生物化学传感器
基于微电子机械系统(micro-electromechanical system; MEMS),能感应(或响应)生物、化学量,并按一定规律将其转换成可用信号(如电信号)输出的器件或装置。
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