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微电子机械系统物理传感器
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微电子机械系统物理传感器
Encyclopedia
工学
微电子机械系统
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micro-electromechanical system physical sensor
微电子机械系统物理传感器
采用微电子和微机械加工技术制造出来的,能把各种物理量转变成便于处理的电信号的传感器件。
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radiation pattern
radiation plasma turbulence
radiation pneumonitis
radiation pollution control
radiation polymerization
radiation polymerization and radiation chemistry of polymers
radiation polyphase flow meter
radiation post-effect
radiation power
radiation preservation
radiation preservation of food
radiation pressure
radiation pressure acceleration
radiation processing
radiation product
radiation-proof in building
radiation-proof suit
radiation properties of crop
radiation properties of high temperature gas
radiation protection
radiation protection dosimetry
radiation protection in mine
radiation protection monitoring
radiation protection principle
radiation protection; radiological protection
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