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微电子机械系统光调制器
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微电子机械系统光调制器
Encyclopedia
工学
微电子机械系统光传感器
释
micro-electromechanical system light modulator
微电子机械系统光调制器
基于微电子机械系统(micro-electromechanical system; MEMS),使光波的某一参量随调制信号变化,从而将信息载在光波上的器件。
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